Introduction to Semiconductors and Vacuum Science

Course Description

ETS 2160C is an introductory course in the field of semiconductor manufacturing and vacuum science within the Engineering Technologies — Specialty Engineering Technology taxonomy of the Florida Statewide Course Numbering System (SCNS). Students are introduced to the fundamental scientific principles, processing methods, and industrial applications that define the semiconductor manufacturing industry. The course integrates an overview of semiconductor materials and device types with foundational vacuum science concepts, recognizing that vacuum technology is a critical enabling technology for semiconductor fabrication processes such as chemical vapor deposition, sputtering, and ion implantation. Laboratory activities reinforce lecture content through hands-on experience with materials handling, vacuum system components, and basic measurement techniques appropriate for an industrial cleanroom environment.

Learning Outcomes

Required Learning Outcomes

Upon successful completion of this course, students will be able to:

• Identify and describe the types of semiconductor materials (elemental, compound, and wide-bandgap) and their fundamental electrical properties.
• Explain the atomic structure and energy band theory underlying semiconductor behavior, including conductors, insulators, and semiconductors.
• Describe the role of doping (n-type and p-type) in controlling the electrical characteristics of semiconductor materials.
• Identify the major steps in the semiconductor device fabrication sequence, including wafer preparation, photolithography, doping, thin film deposition, etching, and packaging.
• Define vacuum terminology and identify the principal vacuum pressure regimes (rough/low, medium, high, and ultra-high vacuum) and their units of measurement.
• Identify and describe the operating principles of common vacuum pump technologies used in semiconductor manufacturing (rotary vane, dry scroll, turbomolecular, cryogenic, and ion pumps).
• Identify and use common vacuum pressure measurement gauges (thermocouple, Pirani, capacitance manometer, ionization gauge) appropriate to each vacuum regime.
• Explain why vacuum conditions are necessary for semiconductor processes including CVD, PVD, sputtering, and ion implantation.
• Demonstrate proper semiconductor materials handling techniques, including wafer handling, storage protocols, and contamination prevention practices.
• Apply safety standards and industry best practices relevant to semiconductor and vacuum technology environments, including chemical safety and ESD precautions.

Optional Learning Outcomes

The following outcomes may be covered depending on institutional resources, program emphasis, and available laboratory equipment:

• Perform basic vacuum system leak checks and interpret pressure readings to diagnose system performance.
• Describe the principles of gas flow regimes (viscous, transitional, and molecular flow) and their significance in vacuum system design.
• Explain the concept of conductance and throughput in vacuum system components (pipes, valves, and chambers).
• Identify semiconductor packaging fundamentals, including die attach, wire bonding, and encapsulation processes.
• Describe the structure and function of basic semiconductor devices (diodes, BJTs, MOSFETs) as they relate to fabrication processes.
• Discuss emerging trends in semiconductor technology, including wide-bandgap semiconductors (SiC, GaN) and nanotechnology applications.

Major Topics

Required Topics

1. Introduction to Semiconductor Technology
   • Overview of the semiconductor industry and its economic significance
   • History and evolution of semiconductor devices
   • Overview of the semiconductor manufacturing supply chain
2. Semiconductor Materials Science
   • Atomic structure and chemical bonding in solids
   • Energy band theory: valence band, conduction band, and band gap
   • Intrinsic and extrinsic semiconductors; elemental (Si, Ge) and compound (GaAs, InP) materials
   • n-type and p-type doping; majority and minority carriers
   • Silicon wafer specifications, crystal growth (Czochralski method), and wafer fabrication
3. Overview of Semiconductor Fabrication Processes
   • Wafer preparation and surface cleaning
   • Photolithography fundamentals
   • Doping techniques: diffusion and ion implantation
   • Thin film deposition: chemical vapor deposition (CVD) and physical vapor deposition (PVD)
   • Etching: wet etching and dry (plasma) etching
   • Introduction to metallization and interconnects
4. Introduction to Vacuum Science
   • Definition and significance of vacuum; historical context
   • Vacuum pressure regimes: rough, medium, high vacuum (HV), and ultra-high vacuum (UHV)
   • Units of pressure (Torr, Pascal, mbar, atm) and unit conversions
   • Kinetic theory of gases: mean free path, molecular density, and gas flow
   • Role of vacuum in semiconductor manufacturing (contamination control, process integrity)
5. Vacuum Pump Technologies
   • Mechanical (roughing) pumps: rotary vane and dry scroll pumps
   • High-vacuum pumps: turbomolecular, cryogenic, and ion pumps
   • Pump selection criteria and staging (roughing + high-vacuum combinations)
   • Basic pump maintenance and safety considerations
6. Vacuum Measurement and Instrumentation
   • Thermocouple and Pirani gauges (rough vacuum)
   • Capacitance manometers
   • Ionization gauges (high and ultra-high vacuum)
   • Gauge selection and calibration practices
7. Semiconductor Materials Handling and Safety
   • Wafer handling techniques and tools; ESD precautions
   • Chemical safety: MSDS/SDS interpretation, PPE, and hazardous materials in semiconductor manufacturing
   • Contamination sources and control strategies
   • Introduction to cleanroom protocols and gowning procedures

Optional Topics

1. Vacuum System Design and Gas Flow
   • Viscous, transitional, and molecular flow regimes
   • Conductance calculations for tubes, orifices, and valves
   • System throughput and pumping speed relationships
   • Leak detection methods and residual gas analysis (RGA)
2. Semiconductor Device Fundamentals
   • p-n junction theory and diode operation
   • Bipolar Junction Transistors (BJTs) and MOSFETs: structure and fabrication linkage
   • Integrated circuit (IC) overview: SSI to VLSI
3. Semiconductor Packaging Fundamentals
   • Die singulation (dicing) and die attach
   • Wire bonding and flip-chip interconnects
   • Package types and encapsulation
4. Emerging Technologies
   • Wide-bandgap semiconductors: SiC and GaN applications
   • Nanotechnology and nanofabrication overview
   • Industry 4.0 and automation in semiconductor manufacturing

Resources & Tools

• Textbook (Vacuum): Hata, D.M., Brewer, E.V., et al., Introduction to Vacuum Technology (Milne Open Textbooks, revised 2024) — available as a free open educational resource.
• Laboratory Equipment: Rotary vane or dry scroll roughing pumps, turbomolecular pump systems, thermocouple and ionization gauges, wafer handling tools, ESD wrist straps, and cleanroom gowning stations.
• Standards & References: SEMI International Standards (wafer specifications, safety guidelines); OSHA semiconductor industry safety guidelines; AVS (American Vacuum Society) educational resources.
• Online Resources: Micro Nano Technology Education Center (MNT-EC) open courseware; Kurt J. Lesker Company educational materials (Lesker University); American Vacuum Society (AVS) tutorials.
• Software/Simulation: Basic vacuum system simulation tools for pump-down curve analysis; semiconductor process simulation introductions (e.g., Silvaco or TCAD demonstrations).

Career Pathways

Completion of ETS 2160C provides foundational preparation for entry-level and advanced positions in Florida's growing semiconductor and advanced manufacturing sectors. Relevant career pathways include:

• Semiconductor Process Technician — Operates and monitors fabrication equipment in wafer manufacturing facilities.
• Cleanroom Operator / Facility Technician — Maintains cleanroom environment standards and supports process equipment in semiconductor fabs.
• Vacuum Systems Technician — Installs, maintains, and troubleshoots vacuum systems used in thin film deposition, etching, and related processes.
• Semiconductor Equipment Maintenance Technician — Performs preventive and corrective maintenance on process tools in a manufacturing environment.
• Manufacturing Quality Technician — Monitors process parameters and performs inspection tasks to ensure product quality in semiconductor manufacturing.

This course is a required component of the Semiconductor Engineering Technology A.S. degree at Valencia College, which articulates to the B.S. in Semiconductor Engineering Technology at the University of Central Florida via the DirectConnect pathway. Successful program completion supports eligibility for entry-level industry certification programs recognized by SEMI International.

Special Information

Program Context: ETS 2160C serves as a gateway course in the Semiconductor Engineering Technology program and the Semiconductor Cleanroom Operator certificate. It is designed to be taken early in the program sequence, requiring no prerequisites, and prepares students for subsequent courses including ETS 2161C (Introduction to Cleanroom Operation), ETS 2162C (Introduction to Cleanroom Vacuum Systems), and ETS 2163C (Semiconductor Fabrication).

Industry Certification Preparation: Course content supports preparation for SEMI-aligned workforce credentials and may award alternative credit toward program requirements for students holding approved Gold Standard industry certifications. Students interested in industry certification should consult their Student Success Coach regarding approved credential pathways.

Lab Safety Requirement: All students must complete a laboratory safety orientation before participating in hands-on activities. This includes proper use of PPE, chemical safety protocols, ESD precautions, and vacuum system safety procedures consistent with OSHA and SEMI safety standards.

Transfer Note: Credit hours earned in this course may be applied toward Valencia College's Semiconductor Engineering Technology A.S. degree and articulate to the University of Central Florida B.S. program via the DirectConnect to UCF® agreement.